Crystallinity of a -axis oriented YBa sub 2 Cu sub 3 O sub 7 minus. delta. thin film epitaxially grown on NdGaO sub 3 (110) by 95 MHz magnetron sputtering
- Superconductivity Research Laboratory, ISTEC, 13-10 Shinonome 1 chome, Koto-ku, Tokyo 135 (Japan)
- Department of Nuclear Engineering, Hokkaido University, 8-West 13-North, Kita-ku, Sapporo 060 (Japan)
An {ital a}-axis oriented 400 A YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} film has been epitaxially deposited on a NdGaO{sub 3} (110) substrate by rf magnetron sputtering using a single YBa{sub 2}Cu{sub 5}O{sub {ital x}} target. An excitation frequency of 94.92 MHz, seven times as high as the conventionally used 13.56 MHz, results in a lower self-bias voltage which reduces degradation of films caused by resputtering due to negatively charged oxygen. Sharp streaks corresponding to the {ital c}-axis lattice parameter of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} have been observed by reflection high-energy electron diffraction, showing that the {ital c}-axis is parallel to the surface of the NdGaO{sub 3} substrate and the film surface is smooth on an atomic scale. The crystallinity has been characterized by Rutherford backscattering channeling analysis. A minimum yield, {chi}{sub min} of 3.2%, has confirmed excellent crystallinity of the {ital a}-axis oriented film.
- OSTI ID:
- 5342497
- Journal Information:
- Applied Physics Letters; (United States), Journal Name: Applied Physics Letters; (United States) Vol. 59:11; ISSN APPLA; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ALKALINE EARTH METAL COMPOUNDS
AMINES
AMMONIUM COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
EPITAXY
FILMS
HIGH-TC SUPERCONDUCTORS
ORGANIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
QUATERNARY COMPOUNDS
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES