High temperature metallization system for solar cells and geothermal probes

Technical Report · Mon Dec 01 04:00:00 EST 1980

OSTI ID:6937028

Wiley, J D; Perepezko, J H; Nordman, J E

Amorphous films of the alloys Ni-Nb, Ni-Mo, W-Si, and Mo-Si were deposited on semiconducting substrates by RF sputtering from composite cathodes. The films adhere extremely well to Si, GaAs, and GaP during and after thermal cycling from -200/sup 0/C to at least 500/sup 0/C. All films investigated to date have remained amorphous during 1 hour anneals at 500/sup 0/C, and some alloy compositions have been found which remain amorphous after annealing at greater than or equal to 575/sup 0/C. Rutherford backscatter analysis has been used to study the diffusivity of Au in amorphous Ni-Nb. D < 10/sup -18/ cm/sup 2//S was found at 450/sup 0/C. Additional diffusion studies have been performed using Auger profiling. Initial results show that amorphous Ni-Nb and W-Si may be excellent diffusion barriers against Cu and Au, respectively, at temperatures less than or equal to 500/sup 0/C.

• Research Organization: Sandia Labs., Albuquerque, NM (USA)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6937028
• Report Number(s): SAND-80-7167
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
15 GEOTHERMAL ENERGY
150303 -- Geothermal Exploration &amp; Exploration Technology-- Exploratory Drilling &amp; Well Logging
36 MATERIALS SCIENCE
360101* -- Metals &amp; Alloys-- Preparation &amp; Fabrication
ALLOYS
AMORPHOUS STATE
ANNEALING
ARSENIC COMPOUNDS
ARSENIDES
COATINGS
COPPER
DIFFUSION
DIRECT ENERGY CONVERTERS
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
FILMS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
GALLIUM PHOSPHIDES
GOLD
HEAT TREATMENTS
HIGH TEMPERATURE
MATERIALS
METALS
MOLYBDENUM ALLOYS
NICKEL ALLOYS
NIOBIUM ALLOYS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PNICTIDES
PROBES
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON
SILICON ALLOYS
SOLAR CELLS
SOLAR EQUIPMENT
SPUTTERING
SUBSTRATES
TRANSITION ELEMENTS
TUNGSTEN ALLOYS
VAPOR DEPOSITED COATINGS
WELL LOGGING EQUIPMENT