Effect of ion mixing on the depth resolution of sputter depth profiling

Journal Article · Mon Oct 03 04:00:00 EDT 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.99977· OSTI ID:6936352

Cheng, Y; Dow, A A; Clemens, B M

The effect of ion mixing on the depth resolution of sputter depth profiling has been studied using x-ray photoelectron spectroscopy and Ar/sup +/ sputtering of Pt/Zr, Pt/Mo, Pt/Ti, and Pt/Ni interfaces. It is shown that the heat of mixing of binary alloys plays an important role in depth resolution. The measured interface width of bilayers consisting of metals with a large and negative heat of mixing (Pt/Zr and Pt/Ti) is significantly broader than that of metals with a nearly zero heat of mixing (Pt/Mo and Pt/Ni). This observation suggests that the mechanism of ion mixing during sputter depth profiling with ion energies of a few keV is the same as ion mixing with ion energies of several hundred keV; diffusion in thermal spikes is the dominant contribution to ion mixing in the systems investigated.

• Research Organization: General Motors Research Laboratories, Warren, Michigan 48090-9055
• OSTI ID: 6936352
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 53:14; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102* -- Metals & Alloys-- Structure & Phase Studies
360106 -- Metals & Alloys-- Radiation Effects
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
ATOM TRANSPORT
BEAMS
CHARGED PARTICLES
COLLISIONS
DIFFUSION
ELECTRON SPECTROSCOPY
ELEMENTS
INTERFACES
ION BEAMS
ION COLLISIONS
IONS
METALS
MOLYBDENUM
NEUTRAL-PARTICLE TRANSPORT
NICKEL
PHOTOELECTRON SPECTROSCOPY
PHYSICAL RADIATION EFFECTS
PLATINUM
PLATINUM METALS
RADIATION EFFECTS
RADIATION TRANSPORT
SPECTROSCOPY
SPUTTERING
TITANIUM
TRANSITION ELEMENTS
ZIRCONIUM