Rapid chemical vapor deposition of superconducting YBa sub 2 Cu sub 3 O sub x

Journal Article · Sun Mar 18 23:00:00 EST 1990 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.103330· OSTI ID:6926432

Lackey, W J; Carter, W B; Hanigofsky, J A; Hill, D N; Barefield, E K; Neumeier, G; O'Brien, D F; Shapiro, M J; Thompson, J R; Green, A J; Moss, III, T S ^[1]; Jake, R A; Efferson, K R ^[2]

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1. Georgia Institute of Technology, Atlanta, Georgia 30332 (USA)
2. American Magnetics, Inc., Oak Ridge, Tennessee 37831-2509 (USA)

A process has been developed that enables the rapid chemical vapor deposition of superconducting YBa{sub 2}Cu{sub 3}O{sub {ital x}}. In this process a finely ground mixture of Y(tmhd){sub 3}, Ba(tmhd){sub 2}, and Cu(tmhd){sub 2} (tmhd=2,2,6,6-tetramethyl-3,5-heptanedionate) is slowly fed, and pneumatically transported, directly into the chemical vapor deposition furnace. Because vaporizers are not used, the number of process parameters that must be controlled is greatly reduced. Deposition rates are at least an order of magnitude greater than those achieved by reagent sublimation. Films have been characterized by scanning electron microscopy, energy dispersive x-ray spectroscopy, x-ray diffraction, and resistance versus temperature measurements. Films produced on planar MgO substrates have {ital T}{sub {ital c}} values that are significantly higher than previously reported for MgO.

• OSTI ID: 6926432
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 56:12; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
FILMS
HEAT TREATMENTS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUBSTRATES
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES