Optical properties of epitaxial CoSi[sub 2] on Si from 0. 062 to 22. 3 eV

Journal Article · Mon Feb 15 04:00:00 EST 1993 · Physical Review, B: Condensed Matter; (United States)

DOI:https://doi.org/10.1103/PhysRevB.47.4356· OSTI ID:6926024

Wu, Z; Arakawa, E T ^[1]; Jimenez, J R; Schowalter, L J ^[2]

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1. Health and Safety Research Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)
2. Physics Department and Center for Integrated Electronics, Rensselaer Polytechnic Institute, Troy, New York 12181 (United States)

The optical constants of epitaxial CoSi[sub 2] films on Si from 0.062 to 22.3 eV have been determined by ellipsometry and reflectance measurements. The energy dependencies of the dielectric functions show Drude behavior at energies lower than [similar to]0.2 eV with Drude parameters [h bar][omega][sub [ital p]]=(5.8[plus minus]0.2) eV and [h bar]/[tau]=(0.09[plus minus]0.02) eV. The energy-loss function, calculated from the optical constants, shows two peaks that correspond to the screened plasma oscillation and volume plasma oscillation of all valence electrons. Using the measured optical constants, a composite thin film of epitaxial CoSi[sub 2] particles embedded in Si is shown to have the absorptance peak due to a surface-plasmon resonance in the CoSi[sub 2] particles. The peak shifts to higher energy as the ellipsoidal particles become more elongated, in good agreement with recent observations by Fathauer [ital et] [ital al]. [Phys. Rev. B 44, 1345 (1991)].

• DOE Contract Number: AC05-84OR21400
• OSTI ID: 6926024
• Journal Information: Physical Review, B: Condensed Matter; (United States), Journal Name: Physical Review, B: Condensed Matter; (United States) Vol. 47:8; ISSN PRBMDO; ISSN 0163-1829
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
CHEMICAL REACTIONS
CHEMISORPTION
COBALT COMPOUNDS
COBALT SILICIDES
CORRELATIONS
DATA
DIELECTRIC TENSOR
ELEMENTS
ELLIPSOMETRY
ENERGY RANGE
EPITAXY
EV RANGE
EV RANGE 01-10
EV RANGE 10-100
EXPERIMENTAL DATA
FILMS
INFORMATION
KRAMERS-KRONIG CORRELATION
MEASURING METHODS
NUMERICAL DATA
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
REFLECTIVITY
SEMIMETALS
SEPARATION PROCESSES
SILICIDES
SILICON
SILICON COMPOUNDS
SORPTION
SORPTIVE PROPERTIES
SURFACE PROPERTIES
TENSORS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS