Contamination control, symposium on minienvironments, symposium on biocontamination control. 1994 proceedings, Volume 1
The section on contamination control is divided into the following areas: advanced cleanroom design and operation; liquid and gas filtration; particle counting in process atmospheres and fluids; high-purity liquids; characterization and control of process chemical contamination; high-purity gases; characterization and control of process defects; APIMS--fundamentals and challenges; advanced wafer cleaning technology; APIMS--applications and technology; waste minimization for wafer cleaning processes; specialty gas purity roadmap panel discussion; contamination aspects of the aerospace industry; surface contamination measurement--particles; modeling for contamination reduction; surface contamination measurement--metals; statistical aspects of contamination control; surface contaminant measurement--organics. The symposium on minienvironments is divided into the following areas: industry standards and trends; SEMATECH study I; studies and applications of minienvironments; design of minienvironments; and testing. Symposium on biocontamination control is divided into advanced microbial contamination control systems and methods and regulatory considerations and international standards for microbial contamination control. Separate abstracts were prepared for 13 papers in this volume.
- OSTI ID:
- 6921030
- Report Number(s):
- CONF-940510--; ISBN: 1-877862-45-2
- Country of Publication:
- United States
- Language:
- English
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