1993 Proceedings volume 1--Contamination control; symposium on minienvironments; symposium on biocontamination control

Conference · Fri Jan 01 04:00:00 EST 1993

OSTI ID:5930544

Volume 1 contains the proceedings from three symposia. Contamination Control includes the following topics: Atmospheric pressure ionization mass spectroscopy (APIMS) applications; APIMS development; contamination control in cleanroom air; defect reduction in semiconductor processes; contamination control in the aerospace industry; filtration of gases; ultrapure chemical and DI water; filtration of chemicals; wafer cleaning/trace contaminant effects; wafer cleaning techniques; detection of particles in UHP fluids; detection of surface particles; modeling contamination; detection of surface organics; modeling, particle transport, deposition, and removal; and detection of surface metallics. Symposium on Minienvironments includes the following: design of minienvironments; robotics and I/O transport; testing, methods, and standards. The Symposium on Biocontamination Control includes the following: microbial CC facility requirements in pharmaceutical, biological, and medical device manufacture; cleaning and disinfecting methods and devices for bio CC; biocontamination control devices, methodology, and standards, airborne and surface microbial monitoring methods and devices; and regulatory issues in bio CC--present and future. All papers within the scope of the Energy Data Base have been processed separately for inclusion on the data base.

• OSTI ID: 5930544
• Report Number(s): CONF-930529--; ISBN: 1-877862-19-3
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
320303 -- Energy Conservation
Consumption
& Utilization-- Industrial & Agricultural Processes-- Equipment & Processes
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400100 -- Analytical & Separations Chemistry
42 ENGINEERING
420202* -- Engineering-- Protective Structures & Equipment
550000 -- Biomedical Sciences
Basic Studies
59 BASIC BIOLOGICAL SCIENCES
ABSTRACTS
AEROSPACE INDUSTRY
AIR CLEANING SYSTEMS
AIR FILTERS
ATMOSPHERES
BIOLOGICAL MATERIALS
CHEMICAL ANALYSIS
CLEAN ROOMS
CLEANING
CONTAINMENT
CONTAINMENT SYSTEMS
CONTAMINATION
CONTROL
CONTROLLED ATMOSPHERES
DESIGN
DETECTION
DOCUMENT TYPES
DRUGS
ELECTRONIC CIRCUITS
ENGINEERED SAFETY SYSTEMS
EQUIPMENT
FABRICATION
FILTERS
INDUSTRY
INTEGRATED CIRCUITS
LEADING ABSTRACT
MASS SPECTROSCOPY
MATERIALS
MATERIALS HANDLING
MATERIALS HANDLING EQUIPMENT
MATHEMATICAL MODELS
MEDICAL SUPPLIES
MEETINGS
MICROELECTRONIC CIRCUITS
MICROORGANISMS
POLLUTION CONTROL EQUIPMENT
ROBOTS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR MATERIALS
SPECTROSCOPY
SURFACE CLEANING
SURFACE FINISHING
USES