Opportunities for sustainable design and operation of cleanspaces: A case study on minienvironment system performance
In order to identify and pursue energy efficiency opportunities associated with cleanrooms, it is necessary to understand the design and operation of cleanroom systems for specific contamination control requirements. With the industrial trend toward more stringent cleanliness class and tightening clean spaces, it is vital to understand the design of minienvironment and the operational performance of its systems. A good understanding of such system performance would help to identify opportunities in efficient energy end-use and wise allocation of resources associated with processes or productions that require minienvironments and cleanrooms. This report summarizes a case study on energy performance of a common minienvironment used in semiconductor industry, and discusses the opportunities in saving energy, in particular, the opportunities in achieving efficient operation and design that entails applications of minienvironments.
- Research Organization:
- Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
- Sponsoring Organization:
- USDOE. Assistant Secretary for Energy Efficiency andRenewable Energy. Office of the Building Technologies Program. State andCommunity Programs; California Energy Commission's Industrial Section ofthe Public Interest Energy Research (PIER) program, Asyst TechnologiesInc
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 886974
- Report Number(s):
- LBNL--56312; BnR: 600305000
- Country of Publication:
- United States
- Language:
- English
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