Transparent, conducting, metallic thin films

Journal Article · Mon Nov 01 04:00:00 EST 1999 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1150075· OSTI ID:688080

Avrekh, M; Thibadeau, B M; Monteiro, O R; Brown, I G ^[1]

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1. Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 (United States)

Metallic films that are sufficiently thin compared to the wavelength of light can be optically transparent, and if the film is continuous and without too many disconnected regions (islands), then the electrical resistivity of the film can remain usefully low as well. That is, surface films that are both electrically conducting and optically transparent can be formed if the film is continuous on the nanoscale over macroscopic distances. We have used a filtered vacuum arc plasma deposition technique to form high quality platinum thin films of thickness of the order of several hundred angstroms, on glass substrates, with optical transparency of order 50{percent}, and with sheet resistance of order 10 {Omega} per square. The films could have application to a number of fields of research and technology. {copyright} {ital 1999 American Institute of Physics.}

• OSTI ID: 688080
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 11 Vol. 70; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ELECTRIC CONDUCTIVITY
LIGHT TRANSMISSION
OPACITY
PLATINUM
SPIN-ON COATING
THIN FILMS
USES
VAPOR DEPOSITED COATINGS