Ion beam patterning of spin-on metalorganic precursors and formation of high T/sub c/ superconductors

Journal Article · Mon Aug 29 04:00:00 EDT 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.100564· OSTI ID:6880606

Gross, M E; Brown, W L; DiCenzo, S B; Hartford, Jr, E H; Yeh, J J; Hong, M

A new technique using ion beams to produce patterned thin films of the high-temperature perovskite superconductor YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ from spin-on metalorganic precursors is described. Spin-coated precursor films are irradiated through a stencil mask with 2.5 MeV He/sup +/ ions, developed in solvent to remove unexposed material, and the remaining patterns are pyrolyzed. Black films of YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ with pattern dimensions on the millimeter scale exhibit orientation with the c axis perpendicular to the film after heat treatments of 990 /sup 0/C for 3 min. The conductivity of a highly oriented, approx.0.4-..mu..m-thick patterned film is characterized by onset of the superconducting transition at 84 K and zero resistivity at 68 K, similar to those of an unirradiated film given the same thermal treatment. Studies on the nature of the ion beam exposed material are discussed.

• Research Organization: ATandT Bell Laboratories, Murray Hill, New Jersey 07974
• OSTI ID: 6880606
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 53:9; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
BEAMS
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
FILMS
ION BEAMS
MASKING
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPIN-ON COATING
SPIN-ON COATINGS
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES