Inorganic-polymer-derived dielectric films
A method is described of coating a substrate with a thin film of a polymer of predetermined porosity, comprising: depositing the thin film on the substrate from a dilute non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polyermic network-forming cation, water, an alcohol or other solvent compatible with the hydrolysis and the polymerization of the metal alkoxide, and an acid or a base. The concentration of the alkoxide in the solution is about 1 to 12 equivalent weight %; and prior to the depositing the film, controlling the structure of the polymer for a given composition of the solution exclusive of the acid or base component and the water component, (a) by adjusting each of the water content, the pH, and the temperature to obtain the desired concentration of alkoxide, and then adjusting the time of standing of the solution prior to lowering the temperature of the solution, and (b) lowering the temperature of the solution after the time of standing to about 15 degrees C or lower to trap the solution in a state in which, after the depositing step, a coating of the desired porosity will be obtained; and curing the deposited film by removing a sufficient quantity of solvent to cause gelation, and heating the film at a temperature compatible with the substrate and effective for crosslinking and densifying the film, whereby there is obtained on the substrate a thin film of a polymer of predetermined porosity and corresponding pore size.
- Assignee:
- Dept. of Energy, Washington, DC
- Patent Number(s):
- US 4652467
- OSTI ID:
- 6869996
- Country of Publication:
- United States
- Language:
- English
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Inorganic-polymer-derived dielectric films
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Related Subjects
360601* -- Other Materials-- Preparation & Manufacture
ALCOHOLS
ALKOXIDES
CATIONS
CHARGED PARTICLES
CHEMICAL REACTIONS
CONTROL
DECOMPOSITION
DEPOSITION
DIELECTRIC MATERIALS
FILMS
GELATION
HEATING
HYDROGEN COMPOUNDS
HYDROLYSIS
HYDROXY COMPOUNDS
IONS
LYSIS
MATERIALS
MOISTURE
ORGANIC COMPOUNDS
OXYGEN COMPOUNDS
PH VALUE
POLYMERIZATION
POLYMERS
POROSITY
SOLVENTS
SOLVOLYSIS
SUBSTRATES
SURFACE COATING
TEMPERATURE CONTROL
THIN FILMS
WATER