Inorganic-polymer-derived dielectric films

Patent · 31 December 1986

OSTI ID:866192

Brinker, C Jeffrey ^[1]; Keefer, Keith D ^[1]; Lenahan, Patrick M ^[2]

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1. Albuquerque, NM
2. State College, PA

A method of coating a substrate with a thin film of a polymer of predetermined porosity comprises depositing the thin film on the substrate from a non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polymeric network forming cation, water, an alcohol compatible with the hydrolysis and the polymerization of the metal alkoxide, and an acid or a base, prior to depositing the film, controlling the structure of the polymer for a given composition of the solution exclusive of the acid or base component and the water component, (a) by adjusting each of the water content, the pH, and the temperature to obtain the desired concentration of alkoxide, and then adjusting the time of standing of the solution prior to lowering the temperature of the solution, and (b) lowering the temperature of the solution after the time of standing to about 15 degrees C. or lower to trap the solution in a state in which, after the depositing step, a coating of the desired porosity will be obtained, and curing the deposited film at a temperature effective for curing whereby there is obtained a thin film of a polymer of a predetermined porosity and corresponding pore size on the substrate.

• Research Organization: AT & T CORP
• DOE Contract Number: AC04-76DP00789
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4652467
• OSTI ID: 866192
• Country of Publication: United States
• Language: English

Related Subjects

/427/438/
15
acid
adjusting
alcohol
alkoxide
base
cation
coating
compatible
component
composition
comprises
comprises depositing
comprising
concentration
content
controlling
corresponding
curing
degrees
deposited
deposited film
depositing
desired
dielectric
dielectric films
effective
exclusive
film
films
forming
hydrolysis
hydrolyzable
inorganic-polymer-derived
lowering
metal
metal alkoxide
method
network
non-gelled
obtain
obtained
ph
polymer
polymeric
polymeric network
polymerization
pore
pore size
porosity
predetermined
prior
size
solution
solution comprising
standing
step
structure
substrate
temperature
temperature effective
time
trap
water
water content
whereby