Optical resonance modes in InGaN/GaN multiple-quantum-well microring cavities

Journal Article · Fri Oct 01 00:00:00 EDT 1999 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.125078· OSTI ID:686844

Zeng, K C; Dai, L; Lin, J Y; Jiang, H X ^[1]

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1. Department of Physics, Kansas State University, Manhattan, Kansas 66506-2601 (United States)

Microrings of varying sizes have been fabricated from In{sub x}Ga{sub 1{minus}x}N/GaN (x{approximately}0.15) multiple quantum wells (MQWs). Photolithography and dry etching techniques including both ion-beam and inductively coupled plasma etching were employed to pattern the III{endash}nitride MQW microrings. Individual microrings were optically pumped and optical resonance modes were observed. The observed mode spacings were consistent with those expected for whispering-gallery (WG) modes within a resonant cavity of cylindrical symmetry, refractive index, and dimensions of the rings under investigation. The results obtained from the microring cavities were compared with those of the III{endash}nitride MQW microdisk cavities. Our results have indicated that resonance modes corresponding to the radial and the WG modes are simultaneously present in microdisk cavities, but only WG modes are available from the microring cavities. Implications of our results on future GaN-based microcavity light emitters have been discussed. {copyright} {ital 1999 American Institute of Physics.}

• OSTI ID: 686844
• Journal Information: Applied Physics Letters, Vol. 75, Issue 17; Other Information: PBD: Oct 1999
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
INDIUM COMPOUNDS
GALLIUM COMPOUNDS
INDIUM NITRIDES
GALLIUM NITRIDES
RINGS
NONLINEAR OPTICS
CAVITY RESONATORS
REFRACTIVE INDEX
SEMICONDUCTOR LASERS