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Superconducting Y-Ba-Cu-O and Er-Ba-Cu-O thin films prepared by sputtering deposition

Conference · · AIP Conf. Proc.; (United States)
OSTI ID:6843161
; ; ; ;
Thin film processes for the high Tc superconductors of perovskite-type oxides are classified into three: (1) deposition at a low substrate temperature followed by a post-annealing at around 900/sup 0/C; (2) deposition at a crystallization temperature 600--800/sup 0/C, followed by the post-annealing; (3) deposition at the crystallization temperature under oxidizing atmosphere. The process (3) possibly lowers the synthesis temperature. It was confirmed that the superconducting thin films of Er-Ba-Cu-O were successfully grown at 650/sup 0/C by the sputtering deposition owing to the process (3). Their onset temperature was 92K with zero-resistivity at 86K.
Research Organization:
Matsushita Electric Industrial Co., Ltd., Moriguchi, Osaka
OSTI ID:
6843161
Report Number(s):
CONF-871178-
Conference Information:
Journal Name: AIP Conf. Proc.; (United States) Journal Volume: 165:1
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
AMORPHOUS STATE
ANNEALING
BARIUM COMPOUNDS
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
CORUNDUM
CRYSTAL STRUCTURE
CRYSTALS
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON DIFFRACTION
EPITAXY
ERBIUM COMPOUNDS
FILMS
HEAT TREATMENTS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MINERALS
MONOCRYSTALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
POLYCRYSTALS
RARE EARTH COMPOUNDS
SAPPHIRE
SCATTERING
SORPTIVE PROPERTIES
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE PROPERTIES
TEMPERATURE DEPENDENCE
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS