Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets: Superconducting and structural properties

Journal Article · Mon May 16 00:00:00 EDT 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.99716· OSTI ID:5279100

Liou, S H; Hong, M; Kwo, J; Davidson, B A; Chen, H S; Nakahara, S; Boone, T; Felder, R J

High T/sub c/ superconducting Y-Ba-Cu-O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y/sub 2/O/sub 3/, BaF/sub 2/, and CuO powders. Transport measurements of the films showed a sharp resistive T/sub c/ (R = 0) at 89 K and a metallic behavior of resistivity versus temperature. The films show preferred orientations when deposited on single-crystal SrTiO/sub 3/ substrates (100) or (110) and followed by a post O/sub 2/ annealing at 825 /sup 0/C.h

• Research Organization: ATandT Bell Laboratories, Murray Hill, New Jersey 07974
• OSTI ID: 5279100
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 52:20; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DATA
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
HIGH TEMPERATURE
INFORMATION
LOW TEMPERATURE
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MORPHOLOGY
NONMETALS
NUMERICAL DATA
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES