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Epitaxial Y-Ba-Cu-O films on Si with intermediate layer by rf magnetron sputtering

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.100488· OSTI ID:7016406
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Epitaxial films of Y-Ba-Cu-O were obtained on a Si substrate, using an epitaxial intermediate layer consisting of BaTiO/sub 3/(or SrTiO/sub 3/)/MgAl/sub 2/O/sub 4/. MgAl/sub 2/O/sub 4/ was epitaxially grown on the Si(100) substrate by chemical vapor deposition. Then, SrTiO/sub 3/ or BaTiO/sub 3/ was also epitaxially grown on the MgAl/sub 2/O/sub 4/ layer by means of rf magnetron sputtering. Epitaxial Y-Ba-Cu-O films were prepared on BaTiO/sub 3/(SrTiO/sub 3/)/MgAl/sub 2/O/sub 4//Si substrates by rf magnetron sputtering. Preparation of an Y-Ba-Cu-O film directly on MgAl/sub 2/O/sub 4//Si was also studied, but only a randomly oriented polycrystalline film has been obtained so far. Resistive superconducting transitions with zero resistance at 65 K on SrTiO/sub 3//MgAl/sub 2/O/sub 4//Si and at 70 K on BaTiO/sub 3//MgAl/sub 2/O/sub 4//Si were observed.

Research Organization:
Fundamental Research Laboratories, NEC Corporation, 4-1-1 Miyazaki, Miyamaeku, Kawasaki, Kanagawa 213, Japan
OSTI ID:
7016406
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 53:20; ISSN APPLA
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DATA
DEPOSITION
ELEMENTS
EPITAXY
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
STRONTIUM TITANATES
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
VAPOR PHASE EPITAXY
VERY LOW TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES