Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

RF sputter deposition of Y-Ba-Cu-O superconducting thin films from an oxide powder target

Conference · · AIP Conf. Proc.; (United States)
OSTI ID:6843145
; ; ;
Thin films of Y-Ba-Cu-O have been fabricated using rf diode sputtering from a single mixed-oxide powder target. The target consisted of about 200 grams of mixed reacted CuO, BaCO/sub 3/, and Y/sub 2/O/sub 3/ powders spread over an 8-inch Cu plate, and mounted horizontally in a standard-model sputtering system. Such a target was used for repeated rf-diode depositions in a ''sputter-up'' mode to a substrate hanging face-down, with deposition rate of order 50--100 A/minute. Substrates investigated include sapphire and yttria- stabilized zirconia. Well-cooled substrates yielded films close to the composition of an YBa/sub 2/Cu/sub 3/O/sub 7/ target. In contrast, uncooled or heated substrates yielded films dramatically deficient in Cu relative to the target. Sputtering for several hours in Ar plasma with 10% O/sub 2/ yielded shiny, black films approx. =1 ..mu..m thick. Subsequent processing of films on zirconia substrates up to 850 /sup 0/C in pure O/sub 2/ yielded an onset of superconductivity at approx. =87 K, with a broad transition to zero resistance at approx. =50 K. Improvements in this transition are expected as process parameters are refined. Effects of varying substrate temperature, rf power, target composition, and post-deposition annealing treatment will be discussed.
Research Organization:
CVC Products, Inc., Rochester, NY 14603
OSTI ID:
6843145
Report Number(s):
CONF-871178-
Conference Information:
Journal Name: AIP Conf. Proc.; (United States) Journal Volume: 165:1
Country of Publication:
United States
Language:
English

Similar Records

High temperature superconducting films by rf magnetron sputtering
Conference · Tue Feb 28 23:00:00 EST 1989 · IEEE Trans. Magn.; (United States) · OSTI ID:6090360
Single target sputtering of superconducting YBa/sub 2/Cu/sub 3/O/sub 7-//sub delta/ thin films on Si (100)
Journal Article · Sun Feb 26 23:00:00 EST 1989 · Appl. Phys. Lett.; (United States) · OSTI ID:6443973
Sequential Ar-O(2) sputtering of Y(2)O(3), BaF(2), and CuO targets for preparation of Y-Ba-Cu-O superconducting films without wet-O(2) annealing
Technical Report · Sun Dec 03 23:00:00 EST 1989 · OSTI ID:6965178

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ANNEALING
BARIUM COMPOUNDS
CHALCOGENIDES
CHEMICAL COMPOSITION
COPPER
COPPER COMPOUNDS
COPPER OXIDES
CORUNDUM
CRYSTALS
DIODE TUBES
DISPERSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELEMENTS
FILMS
HEAT TREATMENTS
METALS
MINERALS
MIXTURES
MODIFICATIONS
MONOCRYSTALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
POWDERS
RF SYSTEMS
SAPPHIRE
SOLID SOLUTIONS
SOLUTIONS
SPUTTERING
SUPERCONDUCTING FILMS
TEMPERATURE DISTRIBUTION
THERMIONIC DIODES
THERMIONIC TUBES
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRANSITION TEMPERATURE
VARIATIONS
YTTRIUM COMPOUNDS
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES