Electrical contact studies of chemically treated YBa sub 2 Cu sub 3 O sub 7 minus x surfaces

Conference · Thu Jan 25 04:00:00 EST 1990 · AIP Conference Proceedings (American Institute of Physics); (USA)

OSTI ID:6826385

Hunt, B D; Foote, M C; Vasquez, R P ^[1]

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1. Center for Space Microelectronics Technology, Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA (USA)

Results on electrical characterization of high T{sub {ital c}} thin film surfaces modified by different surface treatments are presented. In particular, this work examines the effect of a Br/ethanol chemical etch, which has previously been shown to remove surface contamination while preserving the Cu(+2) oxidation state. Electrical measurements of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}}/Au/Nb contact structures fabricated using polycrystalline, post-annealed YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} films with Br-etched surfaces, show improvements of approximately one to two orders of magnitude in contact current densities and resistivities (resistance-area products) relative to unetched contacts. The Br-etch process has produced 10{times}10 {mu}m{sup 2} contacts with contact current densities greater than 400 A/cm{sup 2} and R{sub n}A products as low as 4{times}10{sup {minus}7} {Omega}-cm{sup 2}.

• OSTI ID: 6826385
• Report Number(s): CONF-891092--
• Conference Information: Journal Name: AIP Conference Proceedings (American Institute of Physics); (USA) Journal Volume: 199:1
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL REACTIONS
CONTAMINATION
COPPER COMPOUNDS
COPPER OXIDES
CURRENT DENSITY
ELECTRIC CONDUCTIVITY
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
EQUIPMENT
ETCHING
FABRICATION
FILMS
HIGH-TC SUPERCONDUCTORS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE CONTAMINATION
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES