Evaluation of poly sheet resistivity

Technical Report · Thu Dec 01 04:00:00 EST 1988

OSTI ID:6822540

Williams, M F

A large variation in poly sheet resistivity was seen on product over a period of three months. Sheet resistivity is controlled by the interaction between the ion implant and the furnace anneal which activates the implant. The anneal process was suspected to be at fault since the implant is tightly controlled. Variation between annealing furnace tubes and variation within tubes were both investigated as sources of the variation seen between production lots. A mechanical problem was determined to be the cause of the between-tube variation. It was repaired and a check procedure has been instituted to eliminate the possibility of recurrence. To reduce the within-tube variation, a process change was made to allow the product wafers to reach the desired temperature at the same time as the furnace tube. Previously, the furnace tube reached temperature and then the product wafers were inserted into the tube. This yielded a large time lag for the load wafers to reach the process temperature. Also considered in this report were the effects of timing between processes, the placement of wafers in the poly deposition stage, and the effects of the changed process on the radiation hardness of the device.

• Research Organization: Allied-Signal Aerospace Co., Kansas City, MO (USA). Kansas City Div.
• DOE Contract Number: AC04-76DP00613
• OSTI ID: 6822540
• Report Number(s): KCP-613-4034; ON: DE89004437
• Country of Publication: United States
• Language: English

Related Subjects

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42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
ANNEALING
CONTROL
DATA
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
EXPERIMENTAL DATA
FURNACES
GEOPHYSICAL SURVEYS
HEAT TREATMENTS
INFORMATION
ION IMPLANTATION
MATERIALS
NUMERICAL DATA
PHYSICAL PROPERTIES
POLYMERS
PROCESS CONTROL
SEMICONDUCTOR MATERIALS
SEMIMETALS
SHEETS
SILICON
SURVEYS
TEMPERATURE MEASUREMENT
TEMPERATURE SURVEYS
VARIATIONS