The effect of surface treatment on the electrical properties of metal contacts to boron-doped homoepitaxial diamond film

Journal Article · Thu Feb 01 04:00:00 EST 1990 · IEEE Electron Device Letters (Institute of Electrical and Electronics Engineers); (USA)

DOI:https://doi.org/10.1109/55.46942· OSTI ID:6816990

Grot, S A; Gildenblat, G S; Hatfield, C W; Wronski, C R ^[1]; Badzian, A R; Badzian, T; Messier, R ^[2]

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1. Pennsylvania State Univ., University Park, PA (USA). Dept. of Electrical Engineering
2. Pennsylvania State Univ., University Park, PA (USA). Materials Research Lab.

Both doped and undoped homoepitaxial diamond films were fabricated using microwave plasma-enhanced chemical vapor deposition (CVD). The conductivity of the diamond film is strongly affected by the surface treatment. In particular, exposure of film surface to a hydrogen plasma results in the formation of a conductive layer which can be used to obtain linear (ohmic) {ital I-V} characteristics of the Au/diamond contacts, regardless of the doping level. The proper chemical cleaning of the boron-doped homoepitaxial diamond surface allows the fabrication of Au-gate Schottky diodes with excellent rectifying characteristics at temperatures of at least 400{degrees}C.

• OSTI ID: 6816990
• Journal Information: IEEE Electron Device Letters (Institute of Electrical and Electronics Engineers); (USA), Journal Name: IEEE Electron Device Letters (Institute of Electrical and Electronics Engineers); (USA) Vol. 11:2; ISSN EDLED; ISSN 0741-3106
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
360603* -- Materials-- Properties
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALLOYS
BORON ADDITIONS
BORON ALLOYS
CARBON
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTAL DOPING
DEPOSITION
DIAMONDS
ELECTRICAL PROPERTIES
ELEMENTAL MINERALS
ELEMENTS
FABRICATION
FILMS
GOLD
HYDROGEN
INTERFACES
METALS
MINERALS
NONMETALS
PHYSICAL PROPERTIES
PLASMA
SCHOTTKY BARRIER DIODES
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SOLID-STATE PLASMA
SURFACE COATING
THIN FILMS
TRANSITION ELEMENTS