Long-lived dry-etched AlGaAs/GaAs ridge waveguide laser diodes
Journal Article
·
· Applied Physics Letters; (USA)
- McDonnell Douglas Electronic Systems Company, Opto-Electronics Center, 350 Executive Boulevard, Elmsford, New York 10523 (USA)
Chemically assisted ion beam etching has been utilized to fabricate ridge waveguide GaAs/AlGaAs lasers which are as reliable, if not more so, than their oxide stripe counterparts. Results on 60- and 5-{mu}m-wide ridge waveguide lasers with 600 {mu}m cavity lengths as compared to oxide stripe lasers with the same configuration are reviewed and multikilohour lifetimes are demonstrated.
- OSTI ID:
- 6814158
- Journal Information:
- Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 56:22; ISSN APPLA; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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