Revised electron collision cross sections for silane derived from swarm data
The two-term Boltzmann analysis of the swarm data breaks down completely in pure SiH{sub 4} and SiH{sub 4}-Ramsauer rare gas mixtures. Large discrepancy between the two-term and Monte-Carlo calculated drift velocities in the above systems indicates inconsistency in the existing two-term derived SiH{sub 4} cross sections. The authors have removed this inconsistency by using Monte-Carlo calculations to unfold the cross sections in SiH{sub 4} and in SiH{sub 4}-Ar, -Kr mixtures. It is shown that swarm data in SiH{sub 4}-He mixtures is a valuable alternative where the two-term and Monte-Carlo results agree very well and hence two-term analysis can be accurately used to derive the cross sections in these mixtures. Significantly improved momentum transfer and the first vibrational excitation cross sections for 0-5 eV are presented.
- OSTI ID:
- 67905
- Report Number(s):
- CONF-9310400--
- Journal Information:
- Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 13 Vol. 38; ISSN BAPSA6; ISSN 0003-0503
- Country of Publication:
- United States
- Language:
- English
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