Electron swarm parameters in SiH sub 4 -rare gas mixtures and collision cross sections for monosilane molecules

Journal Article · Sun Mar 31 23:00:00 EST 1991 · IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States)

DOI:https://doi.org/10.1109/27.106823· OSTI ID:5691560

Kurachi, M; Nakamura, Y ^[1]

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1. Keio Univ., Yokohama (Japan). Faculty of Science and Technology

Previously measured drift velocity and longitudinal diffusion coefficient in SiH{sub 4}-Ar mixtures were re-analyzed, and the new vibrational excitation cross sections for monosilane molecules were obtained. Not only were the new cross sections consistent with swarm parameters, but also the ratio of their magnitudes at the resonance peak agreed with recent measurements of the electron beam experiment. Having known the vibrational excitation cross sections, the analysis of the primary ionization coefficient measured in SiH{sub 4}-Kr mixtures led to a consistent inelastic cross section, which possibly corresponds to the total cross section for neutral dissociations for the molecule. In this paper it was confirmed that the derived set of the cross sections also gave good agreement with the electron swarm parameters measured in pure monosilane gas.

• OSTI ID: 5691560
• Journal Information: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States), Journal Name: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States) Vol. 19:2; ISSN ITPSB; ISSN 0093-3813
• Country of Publication: United States
• Language: English

Related Subjects

664300* -- Atomic & Molecular Physics-- Collision Phenomena-- (1992-)
74 ATOMIC AND MOLECULAR PHYSICS
CROSS SECTIONS
DIFFUSION
DISPERSIONS
DISSOCIATION
ELECTRONS
ELEMENTARY PARTICLES
ELEMENTS
ENERGY LEVELS
ENERGY-LEVEL TRANSITIONS
EXCITATION
EXCITED STATES
FERMIONS
FLUIDS
GASES
HYDRIDES
HYDROGEN COMPOUNDS
INELASTIC SCATTERING
IONIZATION
LEPTONS
MIXTURES
NONMETALS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
RARE GASES
RESONANCE
SCATTERING
SILANES
SILICON COMPOUNDS
TOTAL CROSS SECTIONS
VIBRATIONAL STATES