Kinetic energy dependence of dissociative charge--transfer reactions of He sup + , Ne sup + , Ar sup + , Kr sup + , and Xe sup + with silane
- Department of Chemistry, University of Utah, Salt Lake City, UT (USA)
Guided ion-beam techniques are used to measure the cross sections as a function of kinetic energy for reaction of SiH{sub 4} with He{sup +}, Ne{sup +}, Ar{sup +}, Kr{sup +}, and Xe{sup +}. State-specific data for the {sup 2}{ital P}{sub 3/2} ground spin--orbit states of Kr{sup +} and Xe{sup +} are also obtained. The products observed in the He, Ar, and Kr systems are SiH{sup +}{sub {ital x}} for {ital x}=0--3. For the Ne system, formation of SiH{sup +}{sub {ital x}} {ital x} = 0--2, is seen, while in the Xe system only SiH{sup +}{sub 3} and SiH{sup +}{sub 2} are observed. Reactions of He{sup +}, Ne{sup +}, Kr{sup +}, and Xe{sup +} show little dependence on kinetic energy, but for the case of Ar{sup +}, the reaction probability and the product distribution are highly sensitive to the kinetic energy of the system. Thermal reaction rates for all of the reactions are derived and compared with previous measurements. The results for these reactions are explained in terms of vertical ionization from the 1{ital t}{sub 2} and 3{ital a}{sub 1} bands of SiH{sub 4}. The relationships of these reactions to plasma deposition and etching are also discussed.
- OSTI ID:
- 6234052
- Journal Information:
- Journal of Chemical Physics; (USA), Journal Name: Journal of Chemical Physics; (USA) Vol. 93:7; ISSN JCPSA; ISSN 0021-9606
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
400201 -- Chemical & Physicochemical Properties
640304* -- Atomic
Molecular & Chemical Physics-- Collision Phenomena
74 ATOMIC AND MOLECULAR PHYSICS
ARGON IONS
ATOMIC IONS
BEAMS
CATIONS
CHARGE EXCHANGE
CHARGED PARTICLES
CHEMICAL COATING
CHEMICAL REACTION KINETICS
CHEMICAL VAPOR DEPOSITION
COLLISIONS
CROSS SECTIONS
DEPOSITION
DISSOCIATION
ENERGY
ENERGY DEPENDENCE
HELIUM IONS
HYDRIDES
HYDROGEN COMPOUNDS
ION BEAMS
ION COLLISIONS
ION-MOLECULE COLLISIONS
IONS
KINETIC ENERGY
KINETICS
KRYPTON IONS
MOLECULE COLLISIONS
NEON IONS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
REACTION KINETICS
SILANES
SILICON COMPOUNDS
SURFACE COATING
XENON IONS