2D fluid simulation of RF inductive sources

Journal Article · Wed Dec 01 04:00:00 EST 1993 · Bulletin of the American Physical Society

OSTI ID:67898

Hewett, D W; Dipeso, G J; Vahedi, V; Rognlien, T D ^[1]

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1. Lawrence Livermore National Lab., CA (United States)

Inductive and other high density sources are of great interest to industry and are promised to be the next generation of plasma processing reactors. The two-dimensional (R-Z) electromagnetic code ZMR is being modified to include interactions between charged-particles and neutral species for modeling inductive sources self-consistently. Presently, the code models an argon plasma with momentum-transfer, excitation and ionization as electron-neutral reactions and scattering and charge-exchange for the ion-neutral reactions. The electrons and ions are treated as Maxwellian fluid species. In the zero electron inertia limit, the electron momentum equation is combined with a modified set of Maxwell`s equations to do the field advance. The numerical techniques used in ZMR relax the typical temporal and spatial constraints (e.g., {omega}{sub pc}{Delta}t < O(1), {lambda}De/{Delta}x < O(1), and c{Delta}t/{Delta}x < 1) allowing one to choose appropriate time-step to resolve only the frequencies of interest (e.g., {omega}{sub RF}{Delta}t < O(0.1)). Analytic boundary conditions are used to resolve the proper density profile without resolving the Debye sheaths. Density and power profiles will be shown over a wide range of neutral pressures and input powers.

• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 67898
• Report Number(s): CONF-9310400--
• Journal Information: Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 13 Vol. 38; ISSN BAPSA6; ISSN 0003-0503
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
COMPUTERIZED SIMULATION
HIGH-FREQUENCY DISCHARGES
PLASMA FLUID EQUATIONS
TWO-DIMENSIONAL CALCULATIONS
Z CODES