Two-dimensional self-consistent fluid simulation of radio frequency inductive sources

Journal Article · Fri Jul 01 04:00:00 EDT 1994 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)

DOI:https://doi.org/10.1116/1.579326· OSTI ID:7079195

DiPeso, G; Vahedi, V; Hewett, D W; Rognlien, T D ^[1]

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1. Plasma Physics Research Institute and M Division, Lawrence Livermore National Laboratory, Livermore, California 94550 (United States)

The two-dimensional ([ital R][minus][ital Z]) electromagnetic code FMRZ has been used to model inductive sources self-consistently in time. The code models an argon plasma with momentum transfer, excitation, and ionization as electron--neutral reactions and momentum transfer for the ion--neutral reactions. The electrons and ions are treated as fluid species and a reduced set of Maxwell's equations is used to advance the electromagnetic fields. The set of equations used in FMRZ is not subject to typical numerical constraints present in many time dynamic codes, allowing one to choose appropriate time and space scales to resolve only the frequencies and scale lengths of interest. The model retains nonlinear driving terms which give rise to a ponderomotive force that distorts the density profile. Density and power profiles show the physical effects of various terms in the equations. Trends in average density and temperature compare well with an analytic model and other simulation models.

• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 7079195
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States) Vol. 12:4; ISSN 0734-2101; ISSN JVTAD6
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700350* -- Plasma Production
Heating
Current Drive
& Interactions-- (1992-)
700380 -- Elementary & Classical Processes in Plasmas-- (1992-)
ARGON
ATOM COLLISIONS
COLLISIONS
COMPUTERIZED SIMULATION
DENSITY
ELECTRON COLLISIONS
ELECTRON-ATOM COLLISIONS
ELEMENTS
FLUIDS
GASES
ION COLLISIONS
ION-ATOM COLLISIONS
IONIZATION
MOMENTUM TRANSFER
NONMETALS
PHYSICAL PROPERTIES
POWER
RARE GASES
SELF-CONSISTENT FIELD
SIMULATION
TWO-DIMENSIONAL CALCULATIONS