Analytic modeling of RF inductive sources
Journal Article
·
· Bulletin of the American Physical Society
OSTI ID:67896
- Lawrence Livermore National Lab., CA (United States)
The authors have developed a two-dimensional (R-Z) analytic model of an RF inductive source based on magnetized diffusion theory. For a given profile of B{sub r}, the radial component of the magnetic field, all the other electromagnetic field components are calculated. A diffusion equation is then solved to obtain the two-dimensional profiles of the ion density and power density deposited into the electrons. To determine the electron temperature, T{sub e}, and plasma density, n{sub o}, the authors also solve particle and power balance equations. They show a comparison between the analytic results and self-consistent simulation results from the code ZMR.
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 67896
- Report Number(s):
- CONF-9310400--
- Journal Information:
- Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 13 Vol. 38; ISSN BAPSA6; ISSN 0003-0503
- Country of Publication:
- United States
- Language:
- English
Similar Records
2D fluid simulation of RF inductive sources
Two dimensional self-consistent fluid simulation of rf inductive sources
Argon plasma uniformity in a low-pressure inductively coupled plasma source with planar coil
Journal Article
·
Tue Nov 30 23:00:00 EST 1993
· Bulletin of the American Physical Society
·
OSTI ID:67898
Two dimensional self-consistent fluid simulation of rf inductive sources
Conference
·
Tue Nov 16 23:00:00 EST 1993
·
OSTI ID:10106198
Argon plasma uniformity in a low-pressure inductively coupled plasma source with planar coil
Book
·
Sat Dec 30 23:00:00 EST 1995
·
OSTI ID:160762