X-ray microdiffraction studies of an integrated laser-modulator system
We report the use of a spatially resolved x-ray microdiffraction technique for the structural study of an integrated laser-modulator system. The monochromatic (11 keV) x-ray beam microfocused to less than 1 {mu}m in the vertical direction was obtained using a phase zone plate. The photon flux at the focal spot exceeded 3{times}10{sup 10}photons/s/0.01{percent}bw/{mu}m{sup 2}. The intense flux density and high spatial resolution of the focused beam was used to study the structure of a laser-modulator system, which is a 1-{mu}m-wide and 1-mm-long multi-quantum well structure on an InP substrate. The superlattice d-spacing and the strain field in the direction normal to the diffracting planes were mapped as a function of position along the length of the device. {copyright} {ital 1997 American Institute of Physics.}
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 678721
- Report Number(s):
- CONF-9706157-; ISSN 0094-243X; TRN: 99:009192
- Journal Information:
- AIP Conference Proceedings, Vol. 417, Issue 1; Conference: SRI `97: 10. U.S. national conference on synchrotron radiation instrumentation, Ithaca, NY (United States), 17-20 Jun 1997; Other Information: PBD: Jul 1997
- Country of Publication:
- United States
- Language:
- English
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X-ray microdiffraction studies of an integrated laser-modulator system
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