Spatial profiling of ion and neutral excitation in noble gas electron cyclotron resonance plasmas

Journal Article · Wed Dec 01 04:00:00 EST 1993 · Bulletin of the American Physical Society

OSTI ID:67858

Rhoades, R L; Gorbatkin, S M ^[1]

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1. Oak Ridge National Lab., TN (United States)

Due to the complex nature of ECR plasmas, spatial variations can be driven by microwave modes, gas kinetics, and many other factors. In an effort to characterize these variations, spectroscopic techniques were used to profile the spatial distribution of emission from various noble gas neutrals and ions (Kr, Ar, Ne, He, and combinations thereof). Plasmas were generated in a commercial two-coil mirror-field system with typical microwave input powers of 750 W. In argon, the profiles (Ar(696.5nm) and Ar{sup +}(488nm)) were slightly center-peaked at 0.25 mTorr with a gradual transition to a very hollow appearance at 1.0 mTorr. Neon (Ne(585.3nm) and Ne{sup +}(377.7nm)) showed a similar trend from 2.5 mTorr to 10.0 mTorr. In general, ion profiles showed slightly stronger variation than neutral profiles, with the majority gas dominating the overall shape of the profile in mixtures. These measurements along with probe data provide insight into the role of neutral depletion in the formation of hollow emission profiles.

• DOE Contract Number: AC05-84OR21400
• OSTI ID: 67858
• Report Number(s): CONF-9310400--
• Journal Information: Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 13 Vol. 38; ISSN BAPSA6; ISSN 0003-0503
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
ARGON
ELECTRON CYCLOTRON-RESONANCE
EMISSION SPECTRA
HELIUM
HIGH-FREQUENCY DISCHARGES
KRYPTON
NEON
SPATIAL DISTRIBUTION