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American Vacuum Society, national symposium, 28th, Anaheim, CA, November 2-6, 1981, proceedings. Parts 1 and 2

Conference · · J. Vac. Sci. Technol.; (United States)
OSTI ID:6785661

Among the vacuum technology topics considered are thin-film photovoltaics, energy-related optical coatings, coatings and surfaces with specific properties, the deposition, characterization and diagnostics of thin films, grain boundaries and adhesion, critical aspects of semiconductor device processing, the effects of ion bombardment on surfaces, chemisorption and catalysis, electronic excitations and stimulated desorption, and surface vibrational spectroscopy. Also discussed are the dynamics of molecule-surface interactions, surface electronic structure, interface electronics and geometric structures, Schottky barrier formation and silicide interfaces, the growth and structure of interfaces, epitaxial growth, laser and electron beam processing, oxide-semiconductor interfaces, the atomic and electronic structure of semiconductor surfaces, and microlithography.

OSTI ID:
6785661
Report Number(s):
CONF-811113-
Journal Information:
J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 20; ISSN JVSTA
Country of Publication:
United States
Language:
English