American Vacuum Society, national symposium, 28th, Anaheim, CA, November 2-6, 1981, proceedings. Parts 1 and 2
Among the vacuum technology topics considered are thin-film photovoltaics, energy-related optical coatings, coatings and surfaces with specific properties, the deposition, characterization and diagnostics of thin films, grain boundaries and adhesion, critical aspects of semiconductor device processing, the effects of ion bombardment on surfaces, chemisorption and catalysis, electronic excitations and stimulated desorption, and surface vibrational spectroscopy. Also discussed are the dynamics of molecule-surface interactions, surface electronic structure, interface electronics and geometric structures, Schottky barrier formation and silicide interfaces, the growth and structure of interfaces, epitaxial growth, laser and electron beam processing, oxide-semiconductor interfaces, the atomic and electronic structure of semiconductor surfaces, and microlithography.
- OSTI ID:
- 6785661
- Report Number(s):
- CONF-811113-
- Journal Information:
- J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 20; ISSN JVSTA
- Country of Publication:
- United States
- Language:
- English
Similar Records
American Vacuum Society, National Symposium, 31st, Reno, NV, December 4-7, 1984, Proceedings. Parts 1 and 2
American Vacuum Society, National Symposium, 35th, Atlanta, GA, Oct. 2-7, 1988, Proceedings. Parts 1 2
Related Subjects
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
42 ENGINEERING
420800* -- Engineering-- Electronic Circuits & Devices-- (-1989)
CATALYSIS
CHEMICAL REACTIONS
CHEMISORPTION
COATINGS
CRYSTAL STRUCTURE
DEPOSITION
DESORPTION
DIRECT ENERGY CONVERTERS
ELECTRONIC STRUCTURE
FABRICATION
GRAIN BOUNDARIES
INTERFACES
MEETINGS
MICROSTRUCTURE
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SEMICONDUCTOR DEVICES
SEPARATION PROCESSES
SORPTION
SURFACE COATING
VACUUM SYSTEMS