American Vacuum Society, National Symposium, 31st, Reno, NV, December 4-7, 1984, Proceedings. Parts 1 and 2

Conference · Sat Jun 01 00:00:00 EDT 1985 · J. Vac. Sci. Technol., A; (United States)

OSTI ID:5566735

The topics discussed range over cryopump and gettering state-of-the-art methods, the design of plasma etching and deposition equipment, contamination control and automation in vacuum technology, leak detection, gas analysis and gauging procedures, recent advancements and novel applications in coating deposition and ion implantation processes, the growth and physical properties of hard protective coatings, and in situ diagnostics for process control. Also discussed are thin films for optical and magnetic recording, thin film phenomena and reactions, VLSI metallization, microelectronic packaging, interconnections, and novel applications, thin film segregation and growth processes, applications and characterization methods for semiconductor heterojunctions, epitaxy and deposition, dry processing methods, the electronic and atomic structure of semiconductor interfaces, metal-semiconductor interfaces, and the role of surface cleaning in materials and device processing.

• OSTI ID: 5566735
• Report Number(s): CONF-841218-
• Journal Information: J. Vac. Sci. Technol., A; (United States), Vol. 3; Conference: 31. national vacuum symposium, Reno, NV, USA, 3 Dec 1984
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
VACUUM COATING
VACUUM SYSTEMS
MEETINGS
TECHNOLOGY ASSESSMENT
CRYOPUMPS
IMPURITIES
LASER SPECTROSCOPY
LEADING ABSTRACT
MIRRORS
OPTICAL PROPERTIES
PHOTOELECTRIC EMISSION
PHOTOELECTRON SPECTROSCOPY
PLASMA DIAGNOSTICS
PROTECTIVE COATINGS
SEMICONDUCTOR JUNCTIONS
SYNCHROTRON RADIATION
THIN FILMS
TUNGSTEN ALLOYS
ABSTRACTS
ALLOYS
BREMSSTRAHLUNG
COATINGS
DEPOSITION
DOCUMENT TYPES
ELECTROMAGNETIC RADIATION
ELECTRON EMISSION
ELECTRON SPECTROSCOPY
EMISSION
EQUIPMENT
FILMS
JUNCTIONS
LABORATORY EQUIPMENT
PHYSICAL PROPERTIES
PUMPS
RADIATIONS
SPECTROSCOPY
SURFACE COATING
VACUUM PUMPS
420700* - Engineering- Vacuum Engineering- (-1987)