Ion-beam-induced silicide formation

Journal Article · Mon Jan 15 04:00:00 EST 1979 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.90716· OSTI ID:6783244

Tsaur, B Y; Liau, Z L; Mayer, J W

Rutherford-backscattering spectrometry and x-ray-diffraction analysis have been used to investigate intermixing between thin metal films (Pt, Ni, and Hf) and silicon substrates as a result of inert-gas ion bombardment. Silicide phases (Pt/sub 2/Si, Ni/sub 2/Si, and HfSi) were observed near the interface as long as the ion range exceeds the film thickness. For a fixed dose, the silicide thickness increases with the atomic mass of both ion and metal and is greater for Pt/sub 2/Si than HfSi. The growth of Pt/sub 2/Si showed a square-root dependence on ion dose for Ar, Kr, and Xe ions. The phenomenon of ion-induced silicide formation is similar to formation resulting from thermal anneal until the whole metal film is consumed in the reaction, at which point a progressive intermixing to redistribute the metal into deeper regions of the sample occurred along with the disappearance of the structure diffraction patterns.

• Research Organization: California Institute of Technology, Pasadena, California 91125
• OSTI ID: 6783244
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 34:2; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360106* -- Metals & Alloys-- Radiation Effects
ARGON IONS
BACKSCATTERING
CHARGED PARTICLES
CHEMICAL RADIATION EFFECTS
CHEMISTRY
COHERENT SCATTERING
DIFFRACTION
DOSE-RESPONSE RELATIONSHIPS
ELASTIC SCATTERING
ELEMENTS
FILMS
HAFNIUM
HAFNIUM COMPOUNDS
HAFNIUM SILICIDES
ION IMPLANTATION
IONS
IRRADIATION
KRYPTON IONS
METALS
NICKEL
NICKEL COMPOUNDS
NICKEL SILICIDES
PHASE STUDIES
PLATINUM
PLATINUM COMPOUNDS
PLATINUM METALS
PLATINUM SILICIDES
RADIATION CHEMISTRY
RADIATION EFFECTS
REFRACTORY METALS
RUTHERFORD SCATTERING
SCATTERING
SEMIMETALS
SILICIDES
SILICON
SILICON COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
X-RAY DIFFRACTION
XENON IONS