Novel effects of magnetic field on the silane glow discharge

Journal Article · Sat Nov 01 04:00:00 EST 1980 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.92074· OSTI ID:6778764

Taniguchi, M; Hirose, M; Hamasaki, T; Osaka, Y

We have measured the optical-emission spectra of the silane plasma as a function of the external magnetic field, together with the growth rate and vibrational spectra of the resulting a-Si:H films. The optical-emission intensities of the reactive species SiH, H/sub 2/, and H produced in the plasma are appreciably affected by the magnetic field, and the corresponding change in the hydrogen bonding of the deposited films is interpreted in terms of chemical reaction among the species.

• Research Organization: Department of Electrical Engineering, Hiroshima University, Hiroshima 730, Japan
• OSTI ID: 6778764
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 37:9; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700102* -- Fusion Energy-- Plasma Research-- Diagnostics
BINDING ENERGY
CHEMICAL REACTIONS
COMPARATIVE EVALUATIONS
DEPOSITION
ELECTRIC DISCHARGES
ELEMENTS
EMISSION SPECTRA
ENERGY
ENERGY LEVELS
EXCITED STATES
FILMS
GLOW DISCHARGES
HYDRIDES
HYDROGEN
HYDROGEN COMPOUNDS
MAGNETIC FIELDS
NONMETALS
PLASMA
SILANES
SILICON COMPOUNDS
SPECTRA
VIBRATIONAL STATES