Monte Carlo simulation of ionization in a magnetron plasma

Journal Article · Tue May 01 04:00:00 EDT 1990 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.576777· OSTI ID:6765363

Miranda, J E; Goeckner, M J; Goree, J; Sheridan, T E ^[1]

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1. Department of Physics and Astronomy, The University of Iowa, Iowa City, IA (USA)

A Monte Carlo simulation of electrons emitted from the cathode of a planar magnetron is tested against experiments that were reported by Wendt, Lieberman, and Meuth (J. Vac. Sci. Technol. A {bold 6}, 1827 (1988)) and by Gu and Lieberman (J. Vac. Sci. Technol. A {bold 6}, 2960 (1988)). Comparing their measurements of the radial profile of current and the axial profile of optical emission to the ionization profiles predicted by the model, we find good agreement for a typical magnetic field strength of 456 G. We also find that at 456 G the product of the average number of ionizations {l angle}{ital N}{sub {ital i}}{r angle} and the secondary electron emission coefficient {gamma} is {similar to}1. This indicates that secondary emission contributes significantly to the ionization that sustains the discharge. At 171 G, however, {l angle}{ital N}{sub {ital i}}{r angle}{gamma}{much lt}1, revealing that cathode emission is inadequate to sustain a discharge at a low magnetic field.

• OSTI ID: 6765363
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 8:3; ISSN 0734-2101; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700101* -- Fusion Energy-- Plasma Research-- Confinement
Heating
& Production
ELECTRIC DISCHARGES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
IONIZATION
MAGNETIC FIELDS
MAGNETRONS
MEASURING METHODS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MONTE CARLO METHOD
PLASMA