Photoemission and glancing-angle EXAFS (X-ray Absorption Fine Structure) studies of vacuum deposited Al/Cu bilayers

Conference · Fri Jan 01 04:00:00 EST 1988

OSTI ID:6732841

Di Marzio, D; Chen, H; Ruckman, M W; Heald, S M

The effects of oxygen exposure and substrate temperature on the structure and chemical composition of vacuum deposited Al/Cu and Al/O/sub 2//Cu bilayers are studied using photoemission and glancing-angle extended x-ray absorption fine structure (EXAFS) measurements. Use of these complementary techniques permits detailed atomic level characterization of thin film structure nd chemical composition during thin film deposition in vacuum or thin film modification by heat treatment in air. In absence of oxygen contamination, photoemission indicates significant interfacial reaction at room temperature at the Al/Cu interface. Glancing-angle EXAFS shows that an Al-rich Cu-Al alloy forms at the interface at room temperature. Heat treatment promotes alloy formation and CuAl/sub 2/ forms at temperatures from 120 to 150/degree/C. For interface formed after substrate oxygen exposure significant alloying is still observed and Al reduced the Cu-O substrate leading to the formation of Cu-Al and Al/sub 2/O/sub 3/-compounds at room temperatures. Annealing the oxygen exposed interface leads to the formation of a CuAl/sub 2/ phase but at higher temperatures than was observed for sampled produced in ultrahigh vacuum. 20 refs., 5 figs.

• Research Organization: Brookhaven National Lab., Upton, NY (USA)
• DOE Contract Number: AC02-76CH00016; AS05-80ER10742
• OSTI ID: 6732841
• Report Number(s): BNL-41731; CONF-881002-13; ON: DE89001271
• Country of Publication: United States
• Language: English

Related Subjects

440300 -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM
COPPER
DEPOSITION
ELEMENTS
EMISSION
FILMS
METALS
NONMETALS
OXYGEN
PHOTOEMISSION
SCATTERING
SECONDARY EMISSION
SMALL ANGLE SCATTERING
SPECTROSCOPY
SURFACE COATING
THIN FILMS
TRANSITION ELEMENTS
ULTRAHIGH VACUUM
VACUUM COATING
X-RAY SPECTROSCOPY