Hydride precipitation in vapor deposited Ti thin films

Journal Article · Mon Feb 01 04:00:00 EST 1993 · Journal of Materials Research; (United States)

DOI:https://doi.org/10.1557/JMR.1993.0291· OSTI ID:6732733

Peddada, S R; Robertson, I M; Birnbaum, H K ^[1]

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1. Department of Materials Science and Engineering and Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)

Titanium hydrides having two different crystal structures were observed in [alpha]--Ti thin films grown epitaxially on sapphire substrates by [ital e]-beam physical vapor deposition. One of the hydrides ([gamma]-hydride) had a face-centered tetragonal structure ([ital c]/[ital a][ge]1) with an ordered arrangement of hydrogen atoms. The second hydride formed was the fcc [delta]-hydride. The [gamma]-hydride grew as platelets in the [alpha]--Ti lattice with [l brace]10[bar 1]0[r brace][sub Ti] habit planes, whereas the [delta]-hydrides formed directly on the sapphire substrate parallel to the (0001)[sub Ti]. These hydrides are one of the principal causes of film decohesion.

• DOE Contract Number: FG02-91ER45439
• OSTI ID: 6732733
• Journal Information: Journal of Materials Research; (United States), Journal Name: Journal of Materials Research; (United States) Vol. 8:2; ISSN JMREEE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
ADHESION
BEAMS
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CUBIC LATTICES
DEPOSITION
ELECTRON BEAMS
ELEMENTS
FCC LATTICES
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
LEPTON BEAMS
METALS
PARTICLE BEAMS
PHYSICAL VAPOR DEPOSITION
PRECIPITATION
SEPARATION PROCESSES
SURFACE COATING
TETRAGONAL LATTICES
THIN FILMS
TITANIUM
TITANIUM COMPOUNDS
TITANIUM HYDRIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS