Multilayers for soft X-ray optics
Journal Article
·
· IEEE J. Quant. Electron.; (United States)
Optical elements for soft X-ray radiation are required for a wide variety of applications. Multilayer thin films are currently used for some of these applications, and they show potential for many others. The author review the operating and design principles of multilayer soft X-ray mirrors, causes for reflectance losses, fabrication requirements, and characterization and testing procedures.
- Research Organization:
- Catholic Univ. of Puerto Rico, Ponce, PR 00732 (US)
- OSTI ID:
- 6721372
- Journal Information:
- IEEE J. Quant. Electron.; (United States), Journal Name: IEEE J. Quant. Electron.; (United States) Vol. 24:8; ISSN IEJQA
- Country of Publication:
- United States
- Language:
- English
Similar Records
Soft X-ray optics using multilayer mirrors
Aperiodic multilayer structures in soft X-ray radiation optics
Multilayer mirror technology for soft-x-ray projection lithography
Journal Article
·
Sat Dec 31 23:00:00 EST 1983
· Opt. Eng.; (United States)
·
OSTI ID:5643445
Aperiodic multilayer structures in soft X-ray radiation optics
Journal Article
·
Mon Feb 27 23:00:00 EST 2012
· Quantum Electronics (Woodbury, N.Y.)
·
OSTI ID:22044017
Multilayer mirror technology for soft-x-ray projection lithography
Journal Article
·
Tue Nov 30 23:00:00 EST 1993
· Applied Optics; (United States)
·
OSTI ID:5338911