Internal current probing of integrated circuits using magnetic force microscopy

Conference · Tue Dec 31 23:00:00 EST 1991

OSTI ID:6714925

Campbell, A N; Cole, Jr, E I; Dodd, B A; Anderson, R E

Magnetic force microscopy (MFM) has been applied to image currents in internal IC conductors. We present a model for the MFM imaging of IC currents, describe MFM signal generation, and demonstrate the ability to analyze current direction and magnitude with a sensitivity of [approximately] 1 mA dc and [approximately] 1 [mu]A ac. Our experimental results are a significant improvement on the 100 mA ac resolution previously reported using an electron beam to detect IC currents [1].

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: DOE; USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6714925
• Report Number(s): SAND-92-2067C; CONF-930354--2; ON: DE93006752
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
426000* -- Engineering-- Components
Electron Devices & Circuits-- (1990-)
440600 -- Optical Instrumentation-- (1990-)
47 OTHER INSTRUMENTATION
CURRENTS
ELECTRIC CURRENTS
ELECTRONIC CIRCUITS
IMAGES
INTEGRATED CIRCUITS
LASER SPECTROSCOPY
MAGNETIC FIELDS
MICROELECTRONIC CIRCUITS
MICROSCOPY
SPECTROSCOPY