Internal current probing of integrated circuits using magnetic force microscopy

Conference · Wed Jan 01 00:00:00 EST 1992

OSTI ID:6714925

Campbell, A N; Cole, Jr, E I; Dodd, B A; Anderson, R E

Magnetic force microscopy (MFM) has been applied to image currents in internal IC conductors. We present a model for the MFM imaging of IC currents, describe MFM signal generation, and demonstrate the ability to analyze current direction and magnitude with a sensitivity of [approximately] 1 mA dc and [approximately] 1 [mu]A ac. Our experimental results are a significant improvement on the 100 mA ac resolution previously reported using an electron beam to detect IC currents [1].

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE; USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6714925
• Report Number(s): SAND-92-2067C; CONF-930354-2; ON: DE93006752
• Resource Relation: Conference: International reliability physics conference, Atlanta, GA (United States), 22-25 Mar 1993
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
47 OTHER INSTRUMENTATION
INTEGRATED CIRCUITS
MICROSCOPY
ELECTRIC CURRENTS
IMAGES
LASER SPECTROSCOPY
MAGNETIC FIELDS
CURRENTS
ELECTRONIC CIRCUITS
MICROELECTRONIC CIRCUITS
SPECTROSCOPY
426000* - Engineering- Components
Electron Devices & Circuits- (1990-)
440600 - Optical Instrumentation- (1990-)