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U.S. Department of Energy
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Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs

Conference ·
OSTI ID:10186192

This invited paper describes recently reported work on the application of magnetic force microscopy (MFM) to image currents in IC conductors [1]. A computer model for MFM imaging of IC currents and experimental results demonstrating the ability to determine current direction and magnitude with a resolution of {approximately} 1 mA dc and {approximately} 1 {mu}A ac are presented. The physics of MFM signal generation and applications to current imaging and measurement are described.

Research Organization:
Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
AC04-76DP00789
OSTI ID:
10186192
Report Number(s):
SAND--93-1881C; CONF-9309130--1; ON: DE93040754
Country of Publication:
United States
Language:
English