Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs
Conference
·
OSTI ID:10186192
This invited paper describes recently reported work on the application of magnetic force microscopy (MFM) to image currents in IC conductors [1]. A computer model for MFM imaging of IC currents and experimental results demonstrating the ability to determine current direction and magnitude with a resolution of {approximately} 1 mA dc and {approximately} 1 {mu}A ac are presented. The physics of MFM signal generation and applications to current imaging and measurement are described.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10186192
- Report Number(s):
- SAND--93-1881C; CONF-9309130--1; ON: DE93040754
- Country of Publication:
- United States
- Language:
- English
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