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Title: Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs

Abstract

This invited paper describes recently reported work on the application of magnetic force microscopy (MFM) to image currents in IC conductors [1]. A computer model for MFM imaging of IC currents and experimental results demonstrating the ability to determine current direction and magnitude with a resolution of {approximately} 1 mA dc and {approximately} 1 {mu}A ac are presented. The physics of MFM signal generation and applications to current imaging and measurement are described.

Authors:
; ; ;
Publication Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
10186192
Report Number(s):
SAND-93-1881C; CONF-9309130-1
ON: DE93040754
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Conference
Resource Relation:
Conference: 4. European conference on electron and optical beam testing of electronic devices,Zurich (Switzerland),1-3 Sep 1993; Other Information: PBD: 1993
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 47 OTHER INSTRUMENTATION; INTEGRATED CIRCUITS; MICROSCOPY; PROBES; PHYSICS; IMAGE PROCESSING; MAGNETISM; DATA ACQUISITION SYSTEMS; SPATIAL RESOLUTION; FAILURE MODE ANALYSIS; 426000; 440800; COMPONENTS, ELECTRON DEVICES AND CIRCUITS; MISCELLANEOUS INSTRUMENTATION

Citation Formats

Campbell, A.N., Cole, E.I. Jr., Dodd, B.A., and Anderson, R.E. Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs. United States: N. p., 1993. Web.
Campbell, A.N., Cole, E.I. Jr., Dodd, B.A., & Anderson, R.E. Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs. United States.
Campbell, A.N., Cole, E.I. Jr., Dodd, B.A., and Anderson, R.E. Wed . "Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs". United States. https://www.osti.gov/servlets/purl/10186192.
@article{osti_10186192,
title = {Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs},
author = {Campbell, A.N. and Cole, E.I. Jr. and Dodd, B.A. and Anderson, R.E.},
abstractNote = {This invited paper describes recently reported work on the application of magnetic force microscopy (MFM) to image currents in IC conductors [1]. A computer model for MFM imaging of IC currents and experimental results demonstrating the ability to determine current direction and magnitude with a resolution of {approximately} 1 mA dc and {approximately} 1 {mu}A ac are presented. The physics of MFM signal generation and applications to current imaging and measurement are described.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {9}
}

Conference:
Other availability
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