Internal current probing of integrated circuits using magnetic force microscopy
Conference
·
OSTI ID:10131700
Magnetic force microscopy (MFM) has been applied to image currents in internal IC conductors. We present a model for the MFM imaging of IC currents, describe MFM signal generation, and demonstrate the ability to analyze current direction and magnitude with a sensitivity of {approximately} 1 mA dc and {approximately} 1 {mu}A ac. Our experimental results are a significant improvement on the 100 mA ac resolution previously reported using an electron beam to detect IC currents [1].
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10131700
- Report Number(s):
- SAND--92-2067C; CONF-930354--2; ON: DE93006752
- Country of Publication:
- United States
- Language:
- English
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