Method of making a double heterostructure laser

Patent · Tue Feb 10 04:00:00 EST 1987

OSTI ID:6711530

Connolly, J C; Botez, D

A method is described of fabricating a laser which includes a body of semiconductor material including end facets and a substrate, and having a guide layer and an active layer which taper in thickness in the lateral direction, which method comprises the steps of: forming corrugations comprising adjacent vee-shaped channels in a major surface of the substrate and which extend between the end facets; forming a first solution, comprising the elements to be deposited and an element which is also a solvent for the substrate material, having a super-saturated growth condition for planar and concave surfaces and an under-saturated growth condition for convex surfaces; contacting the surface of the substrate having the corrugations therein to the first solution thereby causing a melting of the convex portions of the corrugations to form a plurality of mesas between the concave portions of the corrugations. The surfaces of the mesas are below the surface of the substrate, thereby forming a trough in the surface of the substrate and causing deposition of a first layer to occur over the concave portions of the corrugations and the mesas and the surrounding substrate; and sequentially contacting the substrate with the first layer thereon to different solutions to deposit the remaining layers of the laser over the surface of the first layer.

• Assignee: RCA Corp., Princeton, NJ
• Patent Number(s): US 4642143
• OSTI ID: 6711530
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
DEPOSITION
DIMENSIONS
DISPERSIONS
FABRICATION
LASERS
LAYERS
MATERIALS
MIXTURES
SATURATION
SEMICONDUCTOR DEVICES
SEMICONDUCTOR LASERS
SEMICONDUCTOR MATERIALS
SOLUTIONS
SOLVENTS
SUBSTRATES
SUPERSATURATION
SURFACE TREATMENTS
THICKNESS