Ni, Pd, and Pt on GaAs: A comparative study of interfacial structures, compositions, and reacted film morphologies

Journal Article · Sun Mar 01 04:00:00 EST 1987 · J. Mat. Res.; (United States)

DOI:https://doi.org/10.1557/JMR.1987.0262· OSTI ID:6658474

Sands, T; Keramidas, V G; Yu, A J; Yu, K; Gronsky, R; Washburn, J

The reactions between (100) GaAs and the near-noble metals Ni, Pd, and Pt have been investigated by application of high-resolution transmission electron microscopy (TEM), energy-dispersive analysis of x rays in the scanning TEM and Rutherford backscattering spectrometry. Emphasis is placed on the evolution of the phase distributions, film compositions, and interface morphologies during annealing at temperatures up to 480 /sup 0/C. The first phase in the Ni/GaAs reaction is shown to have the nominal composition Ni/sub 3/GaAs. Ternary phases of the type Pd/sub x/GaAs are also found to be the dominant products of the Pd/GaAs reaction. Conversely, only binary phases result from the Pt/GaAs reaction. These observations are used to construct isothermal sections of the M--Ga--As thin-film phase diagrams. The behavior of a thin (1--2 nm) native oxide--hydrocarbon layer during the Ni/GaAs, Pd/GaAs, and Pt/GaAs reactions is also investigated. Only the Ni/GaAs reaction is noticeably impeded in some regions by this intervening layer. In contrast, the Pd/GaAs and Pt/GaAs reactions tend to mechanically disperse the native oxide layers.

• Research Organization: Bell Communications Research, Inc., Red Bank, New Jersey 07701-7020
• OSTI ID: 6658474
• Journal Information: J. Mat. Res.; (United States), Journal Name: J. Mat. Res.; (United States) Vol. 2:2; ISSN JMREE
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102* -- Metals & Alloys-- Structure & Phase Studies
ANNEALING
ARSENIC COMPOUNDS
ARSENIDES
CHEMICAL REACTIONS
ELECTRON MICROSCOPY
ELEMENTS
FILMS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
HEAT TREATMENTS
INTERFACES
LAYERS
METALS
MICROSCOPY
MORPHOLOGY
NICKEL
PALLADIUM
PHASE STUDIES
PLATINUM
PLATINUM METALS
PNICTIDES
THIN FILMS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY