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U.S. Department of Energy
Office of Scientific and Technical Information

Reducing the switching time of semiconductor devices by neutron irradiation

Patent ·
OSTI ID:6624663

The switching time of certain semiconductor devices is decreased while maintaining other electrical characteristics of the devices by irradiating them with a neutron radiation source of greater than 1.0 MeV. To a dosage between 1 X 1011 and 1 X 1015 neutrons per square centimeter. The irradiation is preferably to a dosage between 1 X 101 and 1 X 1014 neutrons per square centimeter and preferably has substantial energy greater than 14 mev. The devices are also annealed during and/or subsequent to the irradiation at a temperature higher than the highest specified temperature and preferably at least 50/sup 0/C. Higher than the highest specified temperature.

Assignee:
Westinghouse Electric Corp
Patent Number(s):
US 4240844
OSTI ID:
6624663
Country of Publication:
United States
Language:
English