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Transport equation theory of electron backscattering and x-ray production. [30 keV]

Conference ·
OSTI ID:6621795
A transport equation theory of electron backscattering and x ray production is derived and applied to energy dissipation of 30-KeV electrons for copper as a function of depth and to the energy distribution of backscattered electrons for copper, aluminum, and gold. These results are plotted and compared with experiment. Plots for variations of backscattering with atomic number and with angle of incidence, and polar plots of backscattering for 30-keV electrons at normal incidence are also presented. 10 references, seven figures. (JFP)
Research Organization:
California Univ., Berkeley (USA). Lawrence Berkeley Lab.
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
6621795
Report Number(s):
LBL-7356; CONF-780616-3
Country of Publication:
United States
Language:
English