Nonaqueous chemical etch for YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/

Journal Article · Mon Dec 26 04:00:00 EST 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.100547· OSTI ID:6619475

Vasquez, R P; Hunt, B D; Foote, M C

A nonaqueous chemical etch, with Br as the active ingredient, is described which removes the insulating hydroxides and carbonates that form on high-temperature superconductor surfaces as a result of atmospheric exposure. X-ray photoemission spectra have been recorded before and after etching YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ films. It is found that, after the etch, the high binding energy O 1s and Ba 3d peaks associated with surface contaminants are greatly reduced, the Y:Ba:Cu ratio is close to the expected 1:2:3, and the oxidation state of the Cu(2+) is not affected. The resistance of an etched film reaches zero at 78 K, compared to 81 K for a similar unetched film. The suitability of other nonaqueous halogen-based etches is discussed, as is the applicability of this etch to other high T/sub c/ superconductors.

• Research Organization: Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109
• OSTI ID: 6619475
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 53:26; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
BROMINE
CHALCOGENIDES
CHEMICAL REACTIONS
COPPER COMPOUNDS
COPPER OXIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION
ETCHING
HALOGENS
IONIZING RADIATIONS
LOW TEMPERATURE
NONMETALS
OXIDATION
OXIDES
OXYGEN COMPOUNDS
PEROVSKITES
PHOTOEMISSION
PHYSICAL PROPERTIES
RADIATIONS
SECONDARY EMISSION
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS
X RADIATION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES