New scaling relation for sputtered NbN films

Journal Article · Sun Jan 01 04:00:00 EST 1989 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.342582· OSTI ID:6601024

Capone, II, D W; Gray, K E; Kampwirth, R T

A scaling relationship has been discovered between the sputtering rate and the partial pressure of argon P/sub Ar/, which leaves the superconducting properties of NbN films invariant. As P/sub Ar/ increases for a given sputtering rate, there is a linear reduction of T/sub c/ together with a rapid increase, followed eventually by saturation, in H/sub c//sub 2/ at 4.2 K. These produce a maximum in J/sub c/ (measured at 19 T and 4.2 K) at a particular value of P/sub Ar/. Films exhibiting nearly the same set of superconducting properties and microstructures can be made at a higher fixed sputtering rate if the values of P/sub Ar/ are multiplied by a constant scale factor. This scaling relation is found to hold for two separate sputtering systems, one of which uses a standard diffusion pump while the other uses an oilless turbo pump. Additional comparisons with the results of others reinforces the conclusion that the scaling relationship is universal and thus may provide some insight into those factors in the sputtering process which are important for determining the superconducting properties and microstructure of sputtered NbN films.

• Research Organization: Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
• OSTI ID: 6601024
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 65:1; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
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Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204* -- Ceramics
Cermets
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656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ARGON
CHALCOGENIDES
COATINGS
CORUNDUM
CRITICAL FIELD
CRYSTAL STRUCTURE
DATA
DEPOSITION
DIFFUSION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FILMS
FLUIDS
GASES
HIGH TEMPERATURE
INFORMATION
MAGNETIC FIELDS
METALS
MICROSTRUCTURE
MINERALS
NIOBIUM
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
NONMETALS
NUMERICAL DATA
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PARTIAL PRESSURE
PHYSICAL PROPERTIES
PNICTIDES
RARE GASES
REFRACTORY METAL COMPOUNDS
SAPPHIRE
SCALING LAWS
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SUPERCONDUCTORS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRANSITION TEMPERATURE
TYPE-II SUPERCONDUCTORS
ULTRALOW TEMPERATURE
VAPOR DEPOSITED COATINGS
VAPOR PRESSURE
VERY LOW TEMPERATURE