Computer simulation studies of sputtering from clean tungsten and nitrogen reacted tungsten and molybdenum surfaces. Master's thesis

Technical Report · Thu Dec 01 04:00:00 EST 1983

OSTI ID:6588958

Meyerhoff, D

The Naval Postgraduate School computer simulation model QRAD was used to study sputtering from clean and nitrogen reacted tungsten, and from nitrogen reacted molybdenum, for (001) surfaces bombarded by normal incidence argon ions in the energy range from 0.5 keV to 3.0 keV. The simulation results are compared to experimental data obtained by Winters, who concludes, that the difference in the cross sections for the sputtering of nitrogen from W(001) and Mo(001) is dominated by the adsorbate-substrate mass difference since the other important parameters are similar. The simulation however shows little dependence on the substrate mass, but a strong dependence of the sputtering cross sections on the distance of the adatoms above the substrate. The nitrogen position is required to be higher on tungsten than on molybdenum.

• Research Organization: Naval Postgraduate School, Monterey, CA (USA)
• OSTI ID: 6588958
• Report Number(s): AD-A-140900/2
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
ARGON IONS
CHARGED PARTICLES
COMPUTERIZED SIMULATION
CROSS SECTIONS
CRYSTAL LATTICES
CRYSTAL STRUCTURE
ELEMENTS
ENERGY RANGE
ENERGY TRANSFER
FLUIDS
GASES
IONS
KEV RANGE
KEV RANGE 01-10
METALS
MOLYBDENUM
NITROGEN
NONMETALS
RARE GASES
SIMULATION
SPUTTERING
SUBSTRATES
SURFACE PROPERTIES
TRANSITION ELEMENTS
TUNGSTEN