Sputtering of chemisorbed nitrogen from single-crystal planes of tungsten and molybdenum

Journal Article · Sun Feb 15 04:00:00 EST 1987 · Phys. Rev. B: Condens. Matter; (United States)

DOI:https://doi.org/10.1103/PhysRevB.35.2174· OSTI ID:6925729

Winters, H F; Taglauer, E

The sputtering of chemisorbed nitrogen from W(100), W(111), W(110), and Mo(100) by bombardment with helium, argon, and xenon ions has been investigated in the energy range between 300 and 5000 eV. It is concluded that the physical sputtering of chemisorbed nitrogen is not influenced by lattice damage, mixing phenomena, or thermal spikes. The yield does, however, depend upon the type of adsorption site and the mass of the surrounding atoms. It is shown that direct collisions between the ion and adsorbed nitrogen make a significant contribution to the sputter cross section for all ions and at all energies investigated. These direct-collision sputter events strongly influence the energy dependence of the sputter yield so that its behavior is significantly different from single-element materials. The implication of these results for the sputtering of multicomponent materials is discussed.

• Research Organization: IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120-6099
• OSTI ID: 6925729
• Journal Information: Phys. Rev. B: Condens. Matter; (United States), Journal Name: Phys. Rev. B: Condens. Matter; (United States) Vol. 35:5; ISSN PRBMD
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON IONS
BINDING ENERGY
CHARGED PARTICLES
CHEMICAL REACTIONS
CHEMISORPTION
COLLISIONS
CRYSTAL FACES
ELEMENTS
ENERGY
ENERGY RANGE
EV RANGE
EV RANGE 100-1000
HELIUM IONS
ION COLLISIONS
IONS
KEV RANGE
KEV RANGE 01-10
LATTICE PARAMETERS
METALS
MOLYBDENUM
NITROGEN
NONMETALS
SEPARATION PROCESSES
SORPTION
SPUTTERING
TRANSITION ELEMENTS
TUNGSTEN
XENON IONS