Role of yttria-stabilized zirconia produced by ion-beam-assisted deposition on the properties of RuO{sub 2} on SiO{sub 2}/Si

Journal Article · Tue Sep 01 04:00:00 EDT 1998 · Journal of Materials Research

DOI:https://doi.org/10.1557/JMR.1998.0344· OSTI ID:658478

Jia, Q X; Arendt, P; Groves, J R; Fan, Y; Roper, J M; Foltyn, S R ^[1]

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1. Materials Science and Technology Division, MS K763, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)

Highly conductive biaxially textured RuO{sub 2} thin films were deposited on technically important SiO{sub 2}/Si substrates by pulsed laser deposition, where yttria-stabilized zirconia (YSZ) produced by ion-beam-assisted-deposition (IBAD) was used as a template to enhance the biaxial texture of RuO{sub 2} on SiO{sub 2}/Si. The biaxially oriented RuO{sub 2} had a room-temperature resistivity of 37 {mu}{Omega}-cm and residual resistivity ratio above 2. We then deposited Ba{sub 0.5}Sr{sub 0.5}TiO{sub 3} thin films on RuO{sub 2}/IBAD-YSZ/SiO{sub 2}/Si. The Ba{sub 0.5}Sr{sub 0.5}TiO{sub 3} had a pure (111) orientation normal to the substrate surface and a dielectric constant above 360 at 100 kHz. {copyright} {ital 1998 Materials Research Society.}

• OSTI ID: 658478
• Journal Information: Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 9 Vol. 13; ISSN JMREEE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM COMPOUNDS
BARIUM OXIDES
DIELECTRIC PROPERTIES
ELECTRIC CONDUCTIVITY
ENERGY BEAM DEPOSITION
OXYGEN COMPOUNDS
RUTHENIUM COMPOUNDS
RUTHENIUM OXIDES
SILICON
SILICON COMPOUNDS
SILICON OXIDES
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUBSTRATES
TEXTURE
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES