Biaxially oriented conductive La{sub 0.5}Sr{sub 0.5}CoO{sub 3} thin films on SiO{sub 2}/Si

Journal Article · Fri May 01 04:00:00 EDT 1998 · Journal of Vacuum Science and Technology, A

DOI:https://doi.org/10.1116/1.581155· OSTI ID:342635

Jia, Q X; Arendt, P N; Kwon, C; Roper, J M; Fan, Y; Groves, J R; Foltyn, S R ^[1]

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1. Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)

We have grown biaxially textured La{sub 0.5}Sr{sub 0.5}CoO{sub 3} (LSCO) thin films on technically important SiO{sub 2}/Si substrates by pulsed laser deposition, where a biaxially oriented yttria-stabilized zirconia (YSZ) produced by ion-beam-assisted deposition (IBAD) is used as a seed layer to enhance the texture of LSCO on SiO{sub 2}/Si. The degree of in-plane texturing of LSCO is directly related to the quality of IBAD-YSZ. The smaller the value of full width at half maximum of the IBAD-YSZ (220) diffraction peak, the higher the crystallinity of the LSCO film. The biaxially oriented LSCO film deposited at 700{degree}C on SiO{sub 2}/Si shows metallic resistivity versus temperature characteristics and has a room-temperature resistivity of around 110 {mu}{Omega}cm. {copyright} {ital 1998 American Vacuum Society.}

• OSTI ID: 342635
• Report Number(s): CONF-971029--
• Journal Information: Journal of Vacuum Science and Technology, A, Journal Name: Journal of Vacuum Science and Technology, A Journal Issue: 3 Vol. 16; ISSN 0734-2101; ISSN JVTAD6
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
COBALT OXIDES
ELECTRIC CONDUCTIVITY
FERROELECTRIC MATERIALS
ION BEAMS
LANTHANUM OXIDES
STRONTIUM OXIDES
TEXTURE
THIN FILMS
YTTRIUM OXIDES
ZIRCONIUM OXIDES